ee 247b lecture notes

CTN 1/24/14

EE C247B/ME C218: Introduction to MEMS
Lecture 2m: Benefits of Scaling I

EE C245 – ME C218
Introduction to MEMS Design
Spring 2014
Prof. Clark T.-C. Nguyen
Dept. of Electrical Engineering & Computer Sciences
University of California at Berkeley
Berkeley, CA 94720
Lecture Module 2: Benefits of Scaling
EE C245: Introduction to MEMS Design

LecM 2

C. Nguyen

8/20/09

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8/20/09

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Lecture Outline

• Reading: Senturia, Chapter 1
• Lecture Topics:

Benefits of Miniaturization
Examples
GHz micromechanical resonators
Chip-scale atomic clock
Micro gas chromatograph

EE C245: Introduction to MEMS Design

LecM 2

C. Nguyen

Copyright @ 2014 Regents of the University of California

1

CTN 1/24/14

EE C247B/ME C218: Introduction to MEMS
Lecture 2m: Benefits of Scaling I

Benefits of Size Reduction: MEMS

• Benefits of size reduction clear for IC’s in elect. domain

size reduction speed, low power, complexity, economy
• MEMS: enables a similar concept, but …

MEMS extends the benefits of size reduction beyond the electrical domain
Performance enhancements for application domains beyond those satisfied by electronics in the same general categories
Speed

Power Consumption
Complexity
Economy
Robustness

EE C245: Introduction to MEMS Design

Frequency

, Thermal Time Const.

Actuation Energy

, Heating Power

Integration Density
Batch Fab. Pot.

, Functionality

(esp. for packaging)

g-Force Resilience
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C. Nguyen

8/20/09

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8/20/09

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Vibrating RF MEMS

EE C245: Introduction to MEMS Design

LecM 2

C. Nguyen

Copyright @ 2014 Regents of the University of California

2

CTN 1/24/14

EE C247B/ME C218: Introduction to MEMS
Lecture 2m: Benefits of Scaling I

Basic Concept: Scaling Guitar Strings μMechanical Resonator

Vib. Amplitude

Guitar String

Low Q
High Q
110 Hz

Freq.

Vibrating “A”
Vibrating “A”
String (110 Hz)