Thin film are prepared …show more content…
This lead to questions and challenges at several levels of thoughts and to understand this oxides complex lies in the fabrication.
Vanadium dioxide is usually synthesized by means of Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and sol-gel method. The synthesized method depends on the physical and chemical properties and stoichiometry. The film morphology is influenced by the phase transition characteristic. VO2+ are homologous series VnO2n−1 (3 ≤ n ≤ 9) also known as Magneli phases[5]. With careful choice of synthetic conditions is required to produce pure VO2 instead of other Vanadium …show more content…
PVD are highly experimental that can be done in two method; sputtering and deposition which are mainly used for VO2 thin film synthesis. PVD ensures a clean and highly controllable synthesis which results is easily accessed with surface sensitive techniques. Sputter deposition is a technique to production thin film of VO2 based on impact of plasma ions on target, where the material is knocked out and deposited onto a support. This technique requires Oxygen as reactive gas to the sputter plasma in order to fully oxidized layers. Magnets are used to the back of the target the ionization in the plasma to enhanced, yielding more efficient sputter process (magnetron sputtering). This technique is used for coating flat substrate. Vacuum chamber is equipped with a rotating drum inside which sputter device are mounted. Combination of rotating container, it can equally serve to coat particle-like supports.
In 2009, Poelman et. Al conducted deposition of thin vanadia films on flat substrates which opens new pathways of investigating deposition film. The film does not suffer from reduction however; it gives a low surface area of a film that can never be use in a number of catalytic characterization techniques. To increase the surface area one extra step must be made by reducing the substrate particle size. With the rotating drum, vanadia dispersion, speciation and degree of polymerization