Micro ElectroMechanical Systems (MEMS)
1. INTRODUCTION
Micro electromechanical systems (MEMS) are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer level to the millimeter level and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.
Examples of MEMS device applications include inkjet-printer cartridges, accelerometer, miniature robots, microengines, locks inertial sensors microtransmissions, micromirrors, micro actuator (Mechanisms for activating process control equipment by use of pneumatic, hydraulic, or electronic signals) optical scanners, fluid pumps, and transducer, pressure and flow sensors. New applications are emerging as the existing technology is applied to the miniaturization and integration of conventional devices.
These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale. The micro fabrication technology enables fabrication of large arrays of devices, which individually perform simple tasks, but in combination can accomplish complicated functions.
MEMS are not about any one application or device, nor are they defined by a single fabrication process or limited to a few materials. They are a fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated electromechanical systems. MEMS are not only about miniaturization of mechanical systems; they are also a new paradigm for designing mechanical devices and systems.
The MEMS industry has an estimated $10 billion market, and with a projected 10-20% annual growth rate, it is estimated to have a $34 billion market in 2002. Because of the significant impact that MEMS can have
Micro electromechanical systems (MEMS) are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer level to the millimeter level and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.
Examples of MEMS device applications include inkjet-printer cartridges, accelerometer, miniature robots, microengines, locks inertial sensors microtransmissions, micromirrors, micro actuator (Mechanisms for activating process control equipment by use of pneumatic, hydraulic, or electronic signals) optical scanners, fluid pumps, and transducer, pressure and flow sensors. New applications are emerging as the existing technology is applied to the miniaturization and integration of conventional devices.
These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale. The micro fabrication technology enables fabrication of large arrays of devices, which individually perform simple tasks, but in combination can accomplish complicated functions.
MEMS are not about any one application or device, nor are they defined by a single fabrication process or limited to a few materials. They are a fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated electromechanical systems. MEMS are not only about miniaturization of mechanical systems; they are also a new paradigm for designing mechanical devices and systems.
The MEMS industry has an estimated $10 billion market, and with a projected 10-20% annual growth rate, it is estimated to have a $34 billion market in 2002. Because of the significant impact that MEMS can have