Spin Coater
SUMMER INTERNSHIP PROJECT REPORT
ON
SPIN COATER
SUBMITTED TO
Moser Baer India Pvt. Ltd.
(R&D Department)
Under the supervision of:
Mr. Rajgopal S.
(AGM, Research & Development, Moser Baer India Pvt. Ltd.)
SUBMITTED BY
Harsha Sud
Third Year (V semester)
Roll Number : 39/EC/08
Netaji Subhas Institute of Technology, New Delhi
TABLE OF CONTENTS
PREFACE 4
ACKNOWLEDGEMENT 4
ABSTRACT 5
1. ABOUT MOSER BAER STORAGE MEDIA 6
1.1. Overview 8 1. INTRODUCTION TO SPIN COATING 10
2. SPIN COATING PROCESS DESCRIPTION 11
2.1. SPIN SPEED 13 2.2. ACCELERATION 14 2.3. FUME EXHAUST 15 2.4. PROCESS TREND CHARTS 17 3. SPECIFIC PROCESS PROBLEMS 18
3.1. FILM TOO THIN 18 3.2. FILM TOO THICK 19 3.3. COMETS, STREAKS OR FLARES 19 3.4. SWIRL PATTERN 20 3.5. UNCOATED AREAS 20 3.6. Pinholes 21 3.7. Poor reproducibility 21 3.8. Poor film quality 22 4. COMPONENTS USED 23
4.1. ESR DRIVE 23 4.2. Motor 25 Motor accessories 25 4.3. Pneumatic Arm Mechanism 26 CODE 30 4.4 Chucks 35 Types of chucks used 36
BIBLIOGRAPHY 38
ACKNOWLEDGEMENT
With sincere thoughts and deep sense of gratitude I would like to acknowledge the contribution of following groups and individual to the development of my project on Spin Coater in the reputed R&D department at Moser Baer India Pvt. Ltd.
In the line I would like to extend my first and foremost gratitude to my mentor Mr. Rajagopal S. (AGM, Moser Baer India Pvt. Ltd.) and Mr. Umesh Gupta (Maintenance Engineer, Moser Baer India Pvt. Ltd.) who have been the key person for me in getting corporate exposure.
A note of thanks to Mr. Shiva Kumar and to all those, too many to single out by names, which have helped in no small measure by cooperating during by providing their valuable time, inputs and assistance.
Their support, guidance and motivation were very valuable and encouraging.
ABSTRACT
We have
ON
SPIN COATER
SUBMITTED TO
Moser Baer India Pvt. Ltd.
(R&D Department)
Under the supervision of:
Mr. Rajgopal S.
(AGM, Research & Development, Moser Baer India Pvt. Ltd.)
SUBMITTED BY
Harsha Sud
Third Year (V semester)
Roll Number : 39/EC/08
Netaji Subhas Institute of Technology, New Delhi
TABLE OF CONTENTS
PREFACE 4
ACKNOWLEDGEMENT 4
ABSTRACT 5
1. ABOUT MOSER BAER STORAGE MEDIA 6
1.1. Overview 8 1. INTRODUCTION TO SPIN COATING 10
2. SPIN COATING PROCESS DESCRIPTION 11
2.1. SPIN SPEED 13 2.2. ACCELERATION 14 2.3. FUME EXHAUST 15 2.4. PROCESS TREND CHARTS 17 3. SPECIFIC PROCESS PROBLEMS 18
3.1. FILM TOO THIN 18 3.2. FILM TOO THICK 19 3.3. COMETS, STREAKS OR FLARES 19 3.4. SWIRL PATTERN 20 3.5. UNCOATED AREAS 20 3.6. Pinholes 21 3.7. Poor reproducibility 21 3.8. Poor film quality 22 4. COMPONENTS USED 23
4.1. ESR DRIVE 23 4.2. Motor 25 Motor accessories 25 4.3. Pneumatic Arm Mechanism 26 CODE 30 4.4 Chucks 35 Types of chucks used 36
BIBLIOGRAPHY 38
ACKNOWLEDGEMENT
With sincere thoughts and deep sense of gratitude I would like to acknowledge the contribution of following groups and individual to the development of my project on Spin Coater in the reputed R&D department at Moser Baer India Pvt. Ltd.
In the line I would like to extend my first and foremost gratitude to my mentor Mr. Rajagopal S. (AGM, Moser Baer India Pvt. Ltd.) and Mr. Umesh Gupta (Maintenance Engineer, Moser Baer India Pvt. Ltd.) who have been the key person for me in getting corporate exposure.
A note of thanks to Mr. Shiva Kumar and to all those, too many to single out by names, which have helped in no small measure by cooperating during by providing their valuable time, inputs and assistance.
Their support, guidance and motivation were very valuable and encouraging.
ABSTRACT
We have