Vaccum Technology
Vacuum Technology
Nagamitsu Yoshimura
Vacuum Technology
Practice for Scientific Instruments
Dr. Nagamitsu Yoshimura 3-22-75 Fujimoto Kokubunji, Tokyo 185-0031 Japan
ISBN 978-3-540-74432-0
Library of Congress Control Number: 2007933832 c 2008 Springer-Verlag Berlin Heidelberg
e-ISBN 978-3-540-74433-7
This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: WMX Design, Heidelberg Printed on acid-free paper 9 8 7 6 5 4 3 2 1 springer.com
Preface
Many scientific instruments for analyzing specimen surface such as the electron microscope and the Auger electron spectrometer require clean, ultrahigh vacuum. The electron microscope and Auger electron spectrometer need fine electron probe, requiring a field emission emitter which can well work under ultrahigh vacuum. In the electron microscope and the ion microscope, microdischarges due to applying high voltage to electrodes sometime occur, resulting in deterioration of image quality. Microdischarges are related with the gas molecules on the surfaces of insulators and electrodes. For many scientific instruments such as the electron microscope, a very clean, ultrahigh vacuum is necessary in the vicinity of the
Nagamitsu Yoshimura
Vacuum Technology
Practice for Scientific Instruments
Dr. Nagamitsu Yoshimura 3-22-75 Fujimoto Kokubunji, Tokyo 185-0031 Japan
ISBN 978-3-540-74432-0
Library of Congress Control Number: 2007933832 c 2008 Springer-Verlag Berlin Heidelberg
e-ISBN 978-3-540-74433-7
This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Cover design: WMX Design, Heidelberg Printed on acid-free paper 9 8 7 6 5 4 3 2 1 springer.com
Preface
Many scientific instruments for analyzing specimen surface such as the electron microscope and the Auger electron spectrometer require clean, ultrahigh vacuum. The electron microscope and Auger electron spectrometer need fine electron probe, requiring a field emission emitter which can well work under ultrahigh vacuum. In the electron microscope and the ion microscope, microdischarges due to applying high voltage to electrodes sometime occur, resulting in deterioration of image quality. Microdischarges are related with the gas molecules on the surfaces of insulators and electrodes. For many scientific instruments such as the electron microscope, a very clean, ultrahigh vacuum is necessary in the vicinity of the
References: J. B. McGinn, L. W. Swanson, N. A. Martin, M. A. Gesley, M. A. McCord, R. Viswanathan, F. J. Hohn, A. D. Wilson, R. Naumann, and M. Utlaut, “100 kV Schottky electron gun”, J. Vac. Sci. Technol. B 9 6), pp. 2925–2928 (1991).