Accuracy improvement method of eddy current sensor

Accuracy improvement method of eddy current sensor
Qiaoyun Liu1,2, Enming Miao1,2#, Xin Wang1,2, Xianrui Ji1,2
1School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei Anhui,230009,China
2State Key Laboratory for Manufacturing Systems Engineering(Xi’an Jiaotong University), Shanxi,710049,China
#Corresponding Author : [e-mail], TEL: [phone]

KEYWORDS:Eddy Current Sensor; Error Correction; Least Squares

Abstract
Eddy current sensor is widely used in industry,because of its non-contact measurement, and strong anti-interference, etc,. However, its accuracy is difficult to reach the micron-level. This paper uses the accuracy analysis theory and the software error correcting technology to calibrate measurements. Besides, it gives an effective principle, which uses “minimum interval” and “maximum ranges segment” to determine the optimum operating ranges of eddy current sensor, to improve the sensor’s measurement accuracy. This method is used in commercial eddy current sensor, resulting from the improvement of precision.

1.Introduction

Home and abroad, researchers in enhancing the sensor precision theoretical and technical aspects do a large

Eddy current sensor uses eddy current principle

number of studies [2-8],such as associated with

[1], through measuring the relative position of metal

optimal sensor parameter method [3],the differential

caused by different sensor coil inductance,impedance

form of sensor method [4],Using thermal devices or

changes,to achieve displacement measurement.With

temperature characteristics of electronic components,

its

anti-jamming

for the temperature compensation method [5],look-up

ability,high accuracy, good dynamic response,eddy

table compensation method [6],and other methods to

current sensor is widely used in the production line of

improve

high-speed

radial

"minimum interval" and "maximum ranges segment,"